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发明名称
摘要
申请公布号	JP3270421(B2)	申请公布日期	2002.04.02
申请号	JP19990140541	申请日期	1999.04.13
申请人		发明人
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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