| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive heater built-in ceramics member superior in heat-resistance and corrosion resistance, and provide its manufacturing method. SOLUTION: This is the heater built-in ceramics member composed of a ceramics insulator layer, a heater layer inside the ceramics insulator layer, and a reed electrode for an external connection to supply a current to the heater layer, and the reed electrode comprises including electroconductive metal silicide. |
