STRUCTURE OF SPIN CHUCK FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A structure of a spin chuck for fabricating a semiconductor device is provided to supply chemical liquid to both surfaces of a wafer by clamping a side surface or corner portion of the side surface of the wafer. CONSTITUTION: A bracket(102) receives power from a driving source, capable of rotating. A fixing unit(104) is installed to rotate with respect to a rotating pin(103) installed on the bracket. The fixing unit rotates with the respect to the rotating pin by centrifugal force generated when the bracket rotates, so that the side surface of the wafer(101) is fixed.