| 摘要 |
A universal track interface stores a plurality of pre-defined track types for automatically configuring the interface according to the required timing, electrical and hardware configuration for a plurality of different tracks used in semiconductor processing operations. To interface a pump to a track, a predefined track type, comprising interface parameters stored in a track table, is accessed by a microprocessor and used to generate control signals for configuring the interface. An operator input device allows custom interfaces to be defined and stored in the table for use as needed to interface either to non-standard tracks or to vary this track interface according to processing requirements.
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