| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of controlling data output and the like, with which various internal data of control softwares can be outputted to outside at any time, and with which a trouble that otherwise consumes extraordinary time for analysis can be analyzed rapidly and solved, without degrading throughput of an exposure system. SOLUTION: Format conversion of output data in outputting log data is executed with a non-sequence task of low priority (step S104). With this procedure, time-consuming format conversion is executed during waiting period for unit driving of a sequence task, and throughput of the exposure system is not lowered, even if a large amount of data is outputted. This method of controlling data output contains a step of outputting actual data at a time that is different from one, at which the function for the data output is called and a step of executing format conversion of the data at a time point that is different from the one, at which the function for the data output is called. |
