发明名称 PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To facilitate positional adjustment of the needle tip of a contact probe. SOLUTION: A top clamp 11 of a probe device 31 is provided with a base body 33 (adjusting part body), whose one end is fixed on the top clamp 11, while a contact probe 1 is mounted at the other end thereof. A slip 34 is formed between upper and lower surfaces 33a, and 33b of the base body 33 and the base body 33 is divided into a base end part 36 fixed on the top clamp 11 and a tip part 38 with the slit 34 therebetween, while the parts are connected with a connection part 37. The base body 33 is provided with an interval adjusting means 39 for adjusting the interval between the base end part 36 and the tip part 38, on the side of which the tip part 1a of the contact probe 1 can be positioned.
申请公布号 JP2002082128(A) 申请公布日期 2002.03.22
申请号 JP20000274063 申请日期 2000.09.08
申请人 MITSUBISHI MATERIALS CORP 发明人 YAMADA OSAMU;SUGIYAMA TATSUO
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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