Verfahren zur Herstellung von Oxydschichten,申请号DE1995625288-传众专利搜索

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发明名称	Verfahren zur Herstellung von Oxydschichten
摘要
申请公布号	DE69525288(D1)	申请公布日期	2002.03.21
申请号	DE1995625288	申请日期	1995.05.26
申请人	ADVANCED MICRO DEVICES, INC.	发明人	WRISTERS, DIRK J.;KWONG, DIM-LEE;FULFORD, JR.
分类号	C23C16/56;H01L21/28;H01L21/318;H01L21/324;H01L21/336;H01L21/8247;H01L29/51;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/316;H01L21/310;H01L27/115;G11C16/02;C23C16/40	主分类号	C23C16/56
代理机构		代理人
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