| 发明名称 |
OPTICAL METROLOGY SYSTEM AND METHOD EMPLOYING LASER-SERVER SUPPLYING LASER ENERGY TO DISTRIBUTED SLAVE METROLOGY HEADS |
| 摘要 |
A metrology system that has one or more central 'metrology servers' and one or more 'metrology slaves' (70). The server delivers metrology 'pump/probe' signals to multiple slave systems allowing a reduction in the number of high-cost metrology components in the master system (50).
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| 申请公布号 |
WO0223118(A1) |
申请公布日期 |
2002.03.21 |
| 申请号 |
WO2001US42102 |
申请日期 |
2001.09.11 |
| 申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
WOLF, R., GREGORY |
| 分类号 |
G01B11/00;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/00 |
| 代理机构 |
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