发明名称 PHOTORESIST REMOVER COMPOSITION
摘要 The present invention is a photoresist remover composition used in order to remove photoresist during the manufacturing process of semiconductor devices, such as large-scale integrated circuits and very large-scale integrated circuits. The present invention comprises 2∼20 weight % of water-soluble hydroxylamine, 5∼15 weight % of oxime compound, 10∼45 % of water, 4∼15 weight % of organic phenol compound containing 2 or 3 hydroxyl groups, and 30∼55 weight % of alkyl amide.
申请公布号 WO0196964(A8) 申请公布日期 2002.03.21
申请号 WO2001KR00966 申请日期 2001.06.07
申请人 DONGJIN SEMICHEM CO., LTD.;YOON, SUK-IL;PARK, YOUNG-WOONG;OH, CHANG-IL;LEE, SANG-DAI;YOO, CHONG-SOON 发明人 YOON, SUK-IL;PARK, YOUNG-WOONG;OH, CHANG-IL;LEE, SANG-DAI;YOO, CHONG-SOON
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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