摘要 |
The present invention is a photoresist remover composition used in order to remove photoresist during the manufacturing process of semiconductor devices, such as large-scale integrated circuits and very large-scale integrated circuits. The present invention comprises 2∼20 weight % of water-soluble hydroxylamine, 5∼15 weight % of oxime compound, 10∼45 % of water, 4∼15 weight % of organic phenol compound containing 2 or 3 hydroxyl groups, and 30∼55 weight % of alkyl amide.
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申请人 |
DONGJIN SEMICHEM CO., LTD.;YOON, SUK-IL;PARK, YOUNG-WOONG;OH, CHANG-IL;LEE, SANG-DAI;YOO, CHONG-SOON |
发明人 |
YOON, SUK-IL;PARK, YOUNG-WOONG;OH, CHANG-IL;LEE, SANG-DAI;YOO, CHONG-SOON |