DEAD WEIGHT COMPENSATING DEVICE, STAGE DEVICE USING THE SAME, EXPOSURE SYSTEM, AND METHOD OF MANUFACTURING DEVICE USING THE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a dead weight compensating mechanism which can be applied even when a heavy load acts on a pulley shaft by supporting the pulley shaft by a static-pressure bearing having a large load capacity. SOLUTION: In the dead weight compensating mechanism that compensates the dead weight of a stage which can be moved freely along a reference surface by using a pulley 101, a halved static-pressure bearing 103 is used for the pulley shaft 102 which supports the pulley 101. The bearing 103 is constituted of a magnetic material and/or an electromagnet and the stage device is constituted ideally by using the dead weight compensating mechanism, or an exposure system, a measuring instrument, and a working device are constituted by using the stage device.