发明名称 BONDING METHOD OF SMALL PARTS AND MODULE OF COMBINED SMALL PARTS
摘要 A groove (3) having a V-shaped section is provided on a bonding surface (1a) of an IC chip (1) being as a first small part, while an elongate projection (4) having a V-shaped section to engage with the groove (3) of the first IC chip (1) is provided on a corresponding portion of a bonding surface (2a) of an IC chip (2) being as a second small part (2). Then, the IC chips (1, 2) are bonded together by the action of a holding force resulting from fitting the elongate protection (4) of the second IC chip to the groove (3) of the first IC chip (1), together with a bonding force produced between the bonding surfaces by interatomic force and metallic bond.
申请公布号 US2002030285(A1) 申请公布日期 2002.03.14
申请号 US19990297288 申请日期 1999.04.29
申请人 SAWADA KIYOSHI;KAWAI TOMOHIKO 发明人 SAWADA KIYOSHI;KAWAI TOMOHIKO
分类号 H01L21/98;H01L29/06;(IPC1-7):H01L21/44 主分类号 H01L21/98
代理机构 代理人
主权项
地址