发明名称 DUAL DIAPHRAGM PUMP
摘要 A dual diaphragm pump comprises a first chamber, a second chamber, a mechanical link, and a drive mechanism. The first chamber comprises a first cavity and a first diaphragm. The first chamber couples a pump inlet to a pump outlet. The second chamber comprises a second cavity and a second diaphragm. The second chamber couples the pump inlet to the pump outlet. The mechanical link couples the first diaphragm of the first chamber to the second diaphragm of the second chamber. The drive mechanism couples to the first diaphragm and the second diaphragm. In operation, the drive mechanism drives the first diaphragm causing first fluid within the first cavity to exit the pump outlet while causing second fluid to be drawn from the pump inlet into the second cavity. Further in operation, the mechanical link imparts an inlet pressure force from the second diaphragm to the first diaphragm.
申请公布号 WO0194782(A3) 申请公布日期 2002.03.14
申请号 WO2001US17766 申请日期 2001.05.31
申请人 TOKYO ELECTRON LIMITED 发明人 LAYMAN, FREDERICK, P.
分类号 F04B43/02;F04B43/073 主分类号 F04B43/02
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