发明名称 DEVICE FOR CORRECTING DEFECT IN METALLIC FILM
摘要 <p>PROBLEM TO BE SOLVED: To provide a device for correcting a defect in a metallic film by which a mending liquid can be satisfactorily dropped on a defective part when it is dropped on the defective part using a needle member. SOLUTION: The device has a needle member 28 which drops a mending liquid 20 remaining on the bottom edge side on the defective part 17 of a metallic film 12 formed in a photomask 13 by bringing the mending liquid 20 into contact with the defective part 17 and the mending liquid 20 dropped by the needle member 28 is baked. The needle member 28 has an oblique plane 28a formed on the bottom edge.</p>
申请公布号 JP2002072450(A) 申请公布日期 2002.03.12
申请号 JP20000267700 申请日期 2000.09.04
申请人 TOKYO PROCESS SERVICE KK 发明人 SOMEYA SUSUMU
分类号 G03F1/72;(IPC1-7):G03F1/08 主分类号 G03F1/72
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