| 摘要 |
PURPOSE: To efficiently perform highly accurate defect inspection for an inspecting substrate. CONSTITUTION: A position coordinates detecting means detecting position coordinates of a defect part on the inspection target substrate is provided with two sets of guide rails 7031, 7032, and 704 provided in two directions along side edges of the inspection target substrate, a light source 707 movably provided along one set of the guide rails 704 provided in one direction and emitting light perpendicularly to the one direction, a projected member 743 movably provided in a state laid astride the inspection target substrate along one set of the guide rails 7031 and 7032 provided in another direction and projected by light emitted from the light source, and a detection part positioning the light beam emitted from the light source and the projected member above the defect part and detecting the position coordinates of the defect part on the basis of positions of the light source and the projected member in regard to each set of the guide rails.
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