| 摘要 |
PROBLEM TO BE SOLVED: To suppress spalling and falling of re-coated material from a non- erosion part of the body of a target or a packing plate, whereby the generation of dust brought above by the spalling and falling of re-coated material, is diminished, and further, the generation of dust brought about by splash phenomena, and the like, is diminished. SOLUTION: A sputtering target 3 is equipped with the body of the target 1 and the packing plate 2 sputtering the body of the target 1. The non-erosion part of the body of the target 1 is provided with a surface-treatment area 6 prepared by etching treatment or polishing treatment. This surface-treatment area 6 displays an effect (the above suppression) even if being prepared on an erosion part, and further even if being formed on the exposed surface of the packing plate.
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