Arrangements of apertures and optical elements, with positive and negative refractive powers, and radiated target area.

摘要

Each aperture in the arrangement of at least three apertures has an optical element belonging to the arrangement of optical elements. At least one optical element has a positive optical refractive power, and at least one element has a negative optical refractive power. The arrangement is one or two dimensional and has a three-dimensional geometry. Radiation falls upon the arrangement of apertures and absorbs the radiation on the target area.