发明名称 CORRUGATED STYLE ANODE ELEMENT FOR ION PUMPS
摘要 An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cells are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which supports a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.
申请公布号 WO0057452(A3) 申请公布日期 2002.03.07
申请号 WO2000EP02550 申请日期 2000.03.17
申请人 FEI COMPANY 发明人 MCGINN, JAMES, B.;SPAGNOL, MIRIAM
分类号 B01J3/00;H01J41/20;(IPC1-7):H01J41/20 主分类号 B01J3/00
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