摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop jet head which reduces variation in thickness of a vibration plate at a low cost and makes high quality printing possible. SOLUTION: Young's modulus of an active layer substrate 25 of a SOI substrate constituting a vibration plate 10 is made smaller in crosswise direction of the vibration plate 10 than in lengthwise direction. The active layer substrate 25 is of silicon substrate oriented to crystal face direction (100), and crystal axis direction <001> of the active layer substrate in nearly aligned with the crosswise direction of the vibration plate 25.
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