| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system with which a macroinspection and a microinspection may be simultaneously carried out. SOLUTION: This system includes a microscope 1, an imaging device 2 which is mounted in an eyepiece section 3 or C mount section 4 of the microscope 1 and a display device 5 which is mountable to an inspector 6, is approached with a display 7 to the eye 8 of the inspector 8 in mounting and projects the image enlarged by the microscope 1 and picked up by the imaging device 2 to a display 7. An object 14 for inspection is placed on a sample stage 10 of the microscope and the inspector 6 directly inspects the object 14 for inspection with the naked eyes. The object 14 for inspection is enlarged and inspected through this display 7.
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