发明名称 Vertical non-volatile semiconductor memory cell and method for manufaturing the memory cell
摘要 A vertical non-volatile semiconductor memory cell and an associated manufacturing method in which a trench extension, which has a third dielectric layer and a filler material, is formed underneath the vertical semiconductor memory cell with its first dielectric layer, its charge storage layer, its second dielectric layer and its control layer. In this way, the data retention properties and a coupling factor are improved.
申请公布号 US2002024081(A1) 申请公布日期 2002.02.28
申请号 US20010940001 申请日期 2001.08.27
申请人 GRATZ ACHIM 发明人 GRATZ ACHIM
分类号 H01L21/8242;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336;H01L27/108 主分类号 H01L21/8242
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