| 摘要 |
PROBLEM TO BE SOLVED: To provide a slider with a built-in moving coil linear motor achieving a high propulsion while keeping the compactness suppressing its total cross-sectional height and having the same size as a conventional slider. SOLUTION: A movable coil assembly 40 comprises a flat core 41 and at least one set of flat and rectangular 3-phase armature coils 42 wound in a plane crossing the sliding direction with the core 41 as their centers and has high regidity and compactness. A large number of arms of the armature coils 42 contributing to a propulsion are provided for pole widths Wm in the sliding direction of field magnets 30 and 31, so that a high propulsion can be obtained. As polarities of the facing field magnets 30 and 31 are same, the respective attraction cancel each other and a load of a straight movement guide unit, so that a load capacity on a table can be increased.
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