| 摘要 |
PROBLEM TO BE SOLVED: To provide an applicator which can precisely control the thickness of a coating film in the peripheral fringe part area of a substrate and improve the uniformity of the thickness of the coating film. SOLUTION: In the peripheral fringe part areas G1-G4 of the glass substrate G, application is performed by only a first nozzle 51 having one discharge opening, and in an area G5 other than the areas G1-G4, the application is performed by only a second nozzle 52 having a plurality of discharge openings. In this way, the thickness of the coating film in the areas G1-G4 can be controlled easily and precisely so that the uniformity of the thickness of the coating film can be improved. |
