METHOD FOR PRODUCING DROP INJECTING DEVICE

摘要

PURPOSE: A method for producing a drop-injecting device is provided to integrally from entire structure into a silicon base plate and to freely produces an oil passage having terminals. CONSTITUTION: A droplet injecting device comprises a storing chamber(51) storing fluid by being mounted on a side of a silicon base plate; a pressure chamber(52) transferring pressure into the fluid; a buffer(53) connecting the storing chamber and the pressure chamber; a damper(56) mounted on a lower portion of the pressure chamber; a nozzle(57) injecting droplet by being connected to the damper; a vibration plate(54) transferring the pressure into the pressure chamber by being mounted on an upper portion of the storing chamber; and a driving device(55) generating the pressure by driving the vibration plate. Thereby, the droplet-injecting device prevents damage of the vibration plate by adding the vibration plate while controlling thickness of the vibration plate. Moreover, the droplet-injecting device integrally forms entire structure into the silicon base plate.