发明名称 FIELD EFFECT TRANSISTOR CONFIGURATION HAVING A HIGH LATCH-UP STRENGTH AND METHOD FOR THE PRODUCTION THEREOF
摘要 The invention relates to a field effect transistor configuration in which the source region (6), in order to increase the latch-up strength, extends along a trench (2) and below the highly doped base region (8) in a self-adjusting manner.
申请公布号 WO0165606(A3) 申请公布日期 2002.02.14
申请号 WO2001DE00617 申请日期 2001.02.14
申请人 INFINEON TECHNOLOGIES AG;NEIDHART, THOMAS;SCHAEFFER, CARSTEN;SCHAGERL, GUENTER 发明人 NEIDHART, THOMAS;SCHAEFFER, CARSTEN;SCHAGERL, GUENTER
分类号 H01L21/265;H01L21/331;H01L21/336;H01L29/08;H01L29/417;H01L29/423;H01L29/739;H01L29/78 主分类号 H01L21/265
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