发明名称 |
Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition |
摘要 |
The present invention provides a process for synthesizing one-dimensional nanosubstances. A membrane having channels serves as the host material for the synthesis. The anodic membrance is brought into contact with a microwave excited plasma of a precursor gas using an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system. Parallel aligned nanosubstances can be synthesized in the channels of the membrane over a large area. Carbon nitride nanosubstances are synthesized successfully for the first time in the present invention.
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申请公布号 |
US6346303(B1) |
申请公布日期 |
2002.02.12 |
申请号 |
US19990311598 |
申请日期 |
1999.05.14 |
申请人 |
SHIH HAN-CHANG;SUNG SHING-LI;TSAI SHANG-HUA |
发明人 |
SHIH HAN-CHANG;SUNG SHING-LI;TSAI SHANG-HUA |
分类号 |
C01B31/02;C23C16/04;C23C16/26;C23C16/34;D01F9/127;H01J9/02;(IPC1-7):H05H1/18;C23C16/32;C23C16/36 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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