摘要 |
PROBLEM TO BE SOLVED: To provide a single-crystal piezoelectric material, having a large electromechanical coupling factor, a substrate for piezoelectric devices, and a surface acoustic wave device using the substrate. SOLUTION: The piezoelectric material is composed of rare earth-alkaline earth metal-oxyborate-based single crystals, represented by a composition formula M1M24O(BO3)3 (where M1 is one two or more kinds of elements selected from among rare earth elements, and M2 is one or more kinds of elements selected from among alkaline earth metal elements). By cutting the piezoelectric material into pieces and subjecting the surface of each piece to a polishing processing, a substrate 1 for piezoelectric devices is manufactured. Also, by providing on the substrate for piezoelectric devices comb-tooth type electrodes 2 for exciting surface acoustic waves, a surface acoustic wave device is manufactured.
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