发明名称 PIEZOELECTRIC MATERIAL, SUBSTRATE FOR PIEZOELECTRIC DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a single-crystal piezoelectric material, having a large electromechanical coupling factor, a substrate for piezoelectric devices, and a surface acoustic wave device using the substrate. SOLUTION: The piezoelectric material is composed of rare earth-alkaline earth metal-oxyborate-based single crystals, represented by a composition formula M1M24O(BO3)3 (where M1 is one two or more kinds of elements selected from among rare earth elements, and M2 is one or more kinds of elements selected from among alkaline earth metal elements). By cutting the piezoelectric material into pieces and subjecting the surface of each piece to a polishing processing, a substrate 1 for piezoelectric devices is manufactured. Also, by providing on the substrate for piezoelectric devices comb-tooth type electrodes 2 for exciting surface acoustic waves, a surface acoustic wave device is manufactured.
申请公布号 JP2002043891(A) 申请公布日期 2002.02.08
申请号 JP20000225105 申请日期 2000.07.26
申请人 SAKAI CHEM IND CO LTD 发明人 SHIOZAKI TADASHI;SASAKI TAKATOMO;MORI YUSUKE;ABE KAZUMITSU;NAGANO KAZUHIKO;NAKAO HIROSHI;MIZUTANI HIDETO
分类号 C30B29/22;H01L41/09;H01L41/18;H03H3/08;H03H9/25;(IPC1-7):H03H9/25 主分类号 C30B29/22
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