发明名称 A method of making a piezoelectric/electrostrictive device
摘要 A piezoelectric/electrostrictive device includes: a driving portion which is driven by displacement of a piezoelectric/electrostrictive element, a movable portion which operates on the basis of a drive of the driving portion, and a fixed portion for supporting the above driving portion and movable portion. It has a driving portion including thin plates facing each other and a thin film piezoelectric/electrostrictive element formed on the surface of at least one of the thin plates, and the above fixed portion and the above movable portion are joined by the driving portion. In this piezoelectric/electrostrictive element, the movable portion can largely be displaced, and it is not easily affected by a harmful vibration in operation, and it is excellent in mechanical strength, handling efficiency, impact resistance, and moisture resistance.
申请公布号 US2002013987(A1) 申请公布日期 2002.02.07
申请号 US20010961836 申请日期 2001.09.24
申请人 NGK INSULATORS, LTD. 发明人 HIROTA TOSHIKAZU;KIMURA KOJI;TAKEUCHI YUKIHISA
分类号 G02B26/04;G02B26/08;H01L41/09;H01L41/24;H02N2/00;(IPC1-7):H04R17/00;H05K3/36 主分类号 G02B26/04
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