A MEM SENSOR AND A METHOD OF MAKING SAME

摘要

A method of making a micro electro-mechanical switch or tunneling sensor. A cantilevered beamstructure and a mating structure are defined on a first substrate or wafer; and at least one contactstructure and a mating structure are defined on a second substrate or wafer, the mating structureon the second substrate or wafer being of a complementary shape to the mating structure on thefirst substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into aconfronting relationship with the mating structure of the second substrate or wafer. Pressure isapplied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free thecantilevered beam structure for movement relative to the second substrate or wafer.