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发明名称
IMPROVED CHEMICAL MECHANICAL POLISHING SLURRIES FOR METAL
摘要
申请公布号
EP1177068(A1)
申请公布日期
2002.02.06
申请号
EP20000943003
申请日期
2000.06.21
申请人
RODEL HOLDINGS, INC.
发明人
LACK, CRAIG, D.;LUO, QIULIANG;YE, QIANQIU, CHRISTINE;SACHAN, VIKAS;THOMAS, TERENCE, M.;BURKE, PETER, A.
分类号
B24B37/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):B24B1/00;B24D3/34;C09K13/00;H01L21/00;H01L21/321;H01L21/44;H01L21/768
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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