METHOD FOR REGENERATING LIQUID CONTAINING HYDROFLUORIC ACID AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for regenerating a liquid containing hydrofluoric acid and a device therefor simple and easy to be treated and capable of efficiently performing the regeneration of a large quantity over a long period under good separating performance. SOLUTION: This regenerating method comprises a stage in which fluoronitric acid A1 containing metallic salt or the like is heated and evaporated in an evaporating part 2 whose inside surface is formed of a material composed of a fluororesin or silicon carbide or mainly composed of silicon carbide and is separated into the vapor of fluoronitric acid A2 and the remaining solution in which metallic salt or the like are concentrated, a stage in which the vapor obtained in the above stage is cooled in a condensing part 3 whose inside surface is formed of a material composed of a fluororesin or silicon carbide or mainly composed of silicon carbide to obtain fluoronitric acid A2, and a stage in which the concentrated remaining solution is exhaused from the inside of the evaporating part.