| 摘要 |
In a magnetoresistive element, deposition of a conductor layer in a DC magnetron sputtering apparatus causes application of tensile stress to the conductor layer, causing the problem of readily producing separation of the conductor layer. In the present invention, a conductor layer is formed so that the crystal face spacing in the direction perpendicular to the film plane is larger than the crystal face spacing of a bulk material. This permits application of compression stress to the conductor layer, preventing separation of the conductor layer.
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