| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of detection coil arrays with a few number of vias in an induction-type transducer. SOLUTION: The detection coil are formed by connecting two spiral coils to each other and paired superposing spiral coils 20, 22, 24, 26, and 28 on one another. The paired spiral coil 20 starts from (b) and ends in (e), and the paired spiral coil 22 starts from (d) and ends in (g). The paired spiral coils 20 and 24 are disposed with respect to each other by 120 deg. in phase, and the paired spiral coils 24 and 28 are displaced with respect to each other by 120 deg. in phase. The paired spiral coil 20 is connected to the spiral pair 26, which is in a differential relationship with the paired spiral coil 20, at the (e) and (j) via vias provided at the centers of the spiral coils. By forming the spiral coils, it is possible to reduce the number of necessary vias. By superposing the paired spiral coils on one another, it is possible to increase the number of the core arrays.
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