METHOD FOR PRODUCING FINE SILICA POWDER

摘要

PROBLEM TO BE SOLVED: To easily produce fine silica powder suitable for use as a filler for a semiconductor sealant and having a sharp particle size distribution which is mainly in a submicron range. SOLUTION: In the method for producing the fine silica powder, an aqueous slurry containing metallic silicon powder is sprayed in a hot field at >=10 m/see jetting rate and the resulting silica powder is collected. Preferably the slurry is prepared using a medium agitation type wet grinder, the hot field is a chemical flame and the slurry is an aqueous slurry having 20-70% concentration of metallic silicon powder.