| 摘要 |
An apparatus (20) for processing flat media, such as semiconductor wafers, has a rotor (80) including positions (110, 112) for first and second cassettes (120, 122). The cassettes (120, 122) are restrained within the rotor (80) by support tubes (88, 92) and hold down pins (102). The processing capacity of the apparatus is increased, as the apparatus can hold two cassettes.
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