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发明名称
MULTI-COLUMN FIB FOR NANOFABRICATION APPLICATIONS
摘要
申请公布号
EP1171901(A1)
申请公布日期
2002.01.16
申请号
EP20010903706
申请日期
2001.02.07
申请人
FEI COMPANY
发明人
GERLACH, ROBERT, L.;TESCH, PAUL, P.;SWANSON, LYNWOD, W.;UTLAUT, MARK, W.
分类号
C23C14/32;H01J27/26;H01J37/08;H01J37/244;H01J37/305;H01J37/317;(IPC1-7):H01J37/08
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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