| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thin-film silicon solar battery having improved photoelectric conversion characteristics even if an opaque substrate and an opaque electrode is provided, and a method for manufacturing the thin-film silicon solar battery for obtaining the thin-film silicon solar battery having improved photoelectric conversion characteristics efficiently and easily even if the opaque substrate and the opaque electrode is used. SOLUTION: A thin-film silicon solar battery 10 is provided with a substrate 1, a lower electrode 2, a crystalline silicon layer 3 having a pn junction, and an upper electrode 4, the crystalline silicon layer has a density of 1.64-2.33 g/cm3, and at the same time the solar battery 10 consists of a polycrystalline silicon layer 34 in contact with the upper electrode and a microcrystal silicon layer 31 being connected to the lower electrode, the particle diameter of the silicon crystal particle for composing the polycrystalline silicon layer is equal to or more than 0.1μm, and the polycrystalline silicon layer has a thickness of 1.0μm or less and a resistivity of 10Ωcm or less.</p> |
