| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas detection system preventing erroneous detection by measuring gas out of the monitoring target of a gas detector and using a plurality of types of gas detectors. SOLUTION: This gas detection system has a plurality of types of gas detectors 300 corresponding to types of gases of used gases monitoring the presence or absence of a leakage of used gas, an output signal 102 indicating type of used gas during use outputted from an ion implantation device 100 using a plurality of types of gases, and a monitor switching unit 200 switching monitoring gas detectors 300 by the output signal 102.
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