METHOD FOR THERMAL SPRAY COATING AND RARE EARTH OXIDE POWDER USED THEREFOR

摘要

PURPOSE: Provided is a method for thermal spray coating having excellent corrosion resistance to halogenated gases such as fluorinated or chlorinated gases and a rare earth oxide powder having unique granulometric parameters. CONSTITUTION: This thermal-spraying powder is composed of compounds of one or more kinds of elements selected from the 3A group in the periodical table of elements and includes less than 5 ppm iron group metallic compound expressed in terms of the oxide. As the compound of these elements, rare earth metal oxides are exemplified. The above oxides are desirable to be composite oxides with at least one kind or more of elements selected among Al, Si and Zr. The thermal-spraying powder is desirable to have 5-80μm average grain diameter, 0.1-0.7 dispersion index and 1-5 m¬2/g specific surface area. The thermal-sprayed film having the halogen plasma resistance and the thermal-sprayed film for semi-conductor are obtained by thermal-spraying the thermal-spraying powder.