发明名称 |
MAGNETIC SUBSTANCE HOLDING DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processed object holding device with high reliability capable of preventing superposition of noise to a power supply current and holding a bearing made of magnetic substance always precisely at a defined position by balance of a suction force of an electromagnet. SOLUTION: Switching circuits 24 and 34 are driven at a duty ratio corresponding to a position of a bearing 3 and at mutually different on-off timing.</p> |
申请公布号 |
JP2002005166(A) |
申请公布日期 |
2002.01.09 |
申请号 |
JP20000189978 |
申请日期 |
2000.06.23 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
IMAGAWA KAZUHIKO |
分类号 |
F16C32/04;G05D3/12;H01L21/68;H01L21/683;(IPC1-7):F16C32/04 |
主分类号 |
F16C32/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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