发明名称 MAGNETIC SUBSTANCE HOLDING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a processed object holding device with high reliability capable of preventing superposition of noise to a power supply current and holding a bearing made of magnetic substance always precisely at a defined position by balance of a suction force of an electromagnet. SOLUTION: Switching circuits 24 and 34 are driven at a duty ratio corresponding to a position of a bearing 3 and at mutually different on-off timing.</p>
申请公布号 JP2002005166(A) 申请公布日期 2002.01.09
申请号 JP20000189978 申请日期 2000.06.23
申请人 SHIBAURA MECHATRONICS CORP 发明人 IMAGAWA KAZUHIKO
分类号 F16C32/04;G05D3/12;H01L21/68;H01L21/683;(IPC1-7):F16C32/04 主分类号 F16C32/04
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