Probe having micro-projection and manufacturing method thereof

摘要

A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.