发明名称 ELECTRICAL INSULATION OF CHIP WAFERS BY LIQUID PHASE SIO2 DEPOSITION
摘要 <p>The invention concerns the electrical insulation by depositing an insulating silica layer on chip wafers, wafers produced by being diced in a silicon wafer, itself associated with an intermediate adhesive plastic support, which maintains the chips in position after they have been cut out; it consists in: a) preparing a treating liquid phase such as a fluosilic acid silica-saturated at a temperature between 15 °C and 35 °C; b) immersing the chips arranged on their intermediate support in the phase; c) adding an agent providing silica-supersaturation of the phase; d) maintaining the chips in said treatment medium for not more than 10 hours at a temperature ranging between about 15 °C and about 50 °C.</p>
申请公布号 WO2001099172(A1) 申请公布日期 2001.12.27
申请号 FR2001001967 申请日期 2001.06.22
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