摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized low cost pressure regulator capable of maintaining a secondary pressure at a desired valve even for a low pressure difference. SOLUTION: This pressure regulator comprises a first pressure regulating part 51a having a valve 57a controlling a fluid flow rate from a primary side cavity 54 to a secondary side cavity 55, a diaphragm 58a sensing a secondary pressure in the secondary side cavity 55 and transmitting a variation in the secondary pressure to the valve 57a, and a coiled spring 59a energizing the valve 57a in the opening direction through the diaphragm 58a; and a second pressure regulating part 51b having a valve 57b controlling the fluid flow rate from the primary side cavity 54 to the secondary side cavity 55, a diaphragm 58b sensing the primary pressure inside the primary side cavity 54 and transmitting a variation in the primary pressure to the valve 57b, and a coiled spring 59b energizing the valve 57b in the opening direction through the diaphragm 58b.
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