摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stabilized field emission cold-cathode device used for a flat-panel display element or an image pickup element and having highly efficient electron emission. SOLUTION: A metal/insulator thin film heterostructure is used for a cold- cathode material forming a field emission element, one of diamond, AIN, and c-BN is used for an insulator layer, and one of Cu, Sn-Pb, Al, Ag, Au, W is used for a metal layer. Highly efficient and highly stabilized electron emission can be realized, a large-flat-panel display element can be realized by arranging many field emission cold-cathode elements into a plane to form a matrix electrode structure, and a low-power consumption and high-resolution image pickup element can be realized by applying the field emission cold-cathode elements to the image pickup element.</p> |