THIN-FILM MIRROR ELEMENT AND THIN-FILM MIRROR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a thin-film mirror array in which each tilt angle can be varied in a large range and a thin-film mirror element for the thin-film mirror array. SOLUTION: This thin-film mirror element 10 is equipped with a pedestal part 11 for fixation to a board 20 and a thin-film piezoelectric body 12 which has its base end 12a fixed to the top surface 11a of the pedestal part 11. A tip 12b of the thin-film piezoelectric body 12 is extended from the top surface 11a of the pedestal part 11. On the top surface side of the thin-film piezoelectric body 12, an upper thin-film electrode 13 is formed and on the reverse surface side, a lower thin-film electrode 14 is formed. A mirror holding part 15 is fitted to the part of the thin-film piezoelectric body 12 extended from the top surface 11a of the pedestal part 11 and the mirror holding part 15 holds a reflecting mirror 16.