DEVICE AND METHOD FOR INSPECTION

摘要

A device and a method for inspection capable of eliminating the need of a pin coming in contact with a circuit wiring when inspection signals are fed to the circuit wiring and detecting visually unidentifiable micro defects; the inspection device (A) for inspecting the circuit wiring on a circuit board (100), comprising a conductive member (1) disposed on one surface side of the circuit board (100) and supplied with the inspection signals, a signal source (2) for feeding the inspection signals to the conductive member (1), a sensor unit (3) having a plurality of cells (3a) disposed on the other surface side of the circuit board (100) opposedly to the conductive member (1), and a computer (5) for acquiring the signals produced in each cell (3a) by feeding the inspection signals to the conductive member (1).