Microscope for examining industrial components e.g. semiconductor wafer, includes holder and stage having different conductive capacities, which are attached to frame

摘要

The microscope includes a stage (11) and a holder (13c) having different conductive capacities, which are attached to the frame (12) connected to a ground line (201). Independent claims are also included for the following: (a) Microscope system; (b) Microscope unit manufacturing method