HOT PLATE

摘要

A hot plate which is excellent in heat conductivity and in temperature rise/fall characteristics, high in cooling efficiency in cooling, and especially excellent in temperature fall characteristics, and which comprises a resistance heating element formed on the surface or inside of a ceramic substrate, characterized in that the ceramic substrate has a leakage amount of up to 10<-7>Pa.m<3>/sec (He) as measured by a helium leak detector.