| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic-optical-system array having a plurality of electron lenses. SOLUTION: This electronic-optical-system array has electrodes 1, 2, and 3 that are arranged along a plurality of the paths of charged particle beams. Each of the electrodes 1, 2, and 3 has membranes 1A, 2A, and 3A having a plurality of openings that are formed on the plurality of paths of the charged particle beams, and support parts 1B, 2B, and 3B for supporting the membranes. The electrodes 1, 2, and 3 are arranged so that nesting structure can be formed. |
