Apparatus and method of inspecting semiconductor integrated circuit

摘要

Versatility of an inspection apparatus suitable for use in a burn-in inspection operation is improved so as to enable inspection of various semiconductor integrated circuits. A plurality of relay pins which are electrically connected to wiring patterns laid on a base board are provided. Sockets for receiving a semiconductor integrated circuits are mounted on a base board. An exchange board is provided for electrically connecting socket terminals of the socket to specific relay pins. The exchange board is mounted on the base board via spacers. In accordance with the type of semiconductor integrated circuits, the exchange board and the socket are replaced.