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发明名称
SPUTTERING DEVICE USING UNIFORM PLASMA
摘要
申请公布号
KR20010107142(A)
申请公布日期
2001.12.07
申请号
KR20000028387
申请日期
2000.05.25
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
BAEK, GEUM JU;KIM, SEUNG YUL;SON, SANG HO
分类号
G02F1/136;(IPC1-7):G02F1/136
主分类号
G02F1/136
代理机构
代理人
主权项
地址
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